Europlanet Distributed Research and Technology Infrastructure (RTI) Facility – Korea Basic Science Institute (KBSI) Nano Secondary Ion Mass Spectrometer
Average Transnational Access (TA) visit: 7 days
Features:
- P- Primary Ion : Cs+, O2+, O–
- Smaller beam size to spatial resolution: 50nm
- Cs+ : 50 nm, O– : 200 nm
- Mass range: 1 to 360 amu
- High mass resolution: M/dM > 5000
- Detection limits: ppb ~ ppm levels
- Five masses parallel detection
Application:
- Element distribution analysis of cathode, anode materials
- Depth profiles of impurities in the micro patterns for semiconductors
- Element distribution analysis of grain boundary segregation in steel
- High-sensitivity imaging of light elements (including hydrogen)
Contact
You must get in touch with the host facility to discuss the technical feasibility of your proposal before submitting an application. If you do not contact the host, your proposal will not be approved.
Dr. Keewook Yi, Korea Basic Science Institute (KBSI), South Korea.
Email: kyi[at]kbsi.re.kr
