Please Note: The Europlanet 2024 RI project, which received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 871149, closed in July 2024. This archive page describes Transnational Access (TA) activities funded through the Europlanet 2024 RI project.
TA2 Facility 29 – Nano Secondary Ion Mass Spectrometer (South Korea)
Average visit: 7 days
Features:
- P- Primary Ion : Cs+, O2+, O–
- Smaller beam size to spatial resolution: 50nm
- Cs+ : 50 nm, O– : 200 nm
- Mass range: 1 to 360 amu
- High mass resolution: M/dM > 5000
- Detection limits: ppb ~ ppm levels
- Five masses parallel detection
Application:
- Element distribution analysis of cathode, anode materials
- Depth profiles of impurities in the micro patterns for semiconductors
- Element distribution analysis of grain boundary segregation in steel
- High-sensitivity imaging of light elements (including hydrogen)
Contact:
Dr. Keewook Yi, KBSI
Email: kyi[at]kbsi.re.kr
Website: WOLF portal information
Report summaries of TA visits to facility
Publications related to TA2.29 facilities and visits
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